Tunneling spectroscopy of superconducting MoN and NbTiN grown by atomic layer deposition
Küçük Resim Yok
Tarih
2014
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Amer Inst Physics
Erişim Hakkı
info:eu-repo/semantics/openAccess
Özet
A tunneling spectroscopy study is presented of superconducting MoN and Nb0.8Ti0.2N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV, respectively, with a corresponding critical temperature of 11.5K and 13.4K, among the highest reported T-c values achieved by the ALD technique. Tunnel junctions were obtained using a mechanical contact method with a Au tip. While the native oxides of these films provided poor tunnel barriers, high quality tunnel junctions with low zero bias conductance (below similar to 10%) were obtained using an artificial tunnel barrier of Al2O3 on the film's surface grown ex situ by ALD. We find a large critical current density on the order of 4 x 10(6) A/cm(2) at T = 0.8T(c) for a 60 nm MoN film and demonstrate conformal coating capabilities of ALD onto high aspect ratio geometries. These results suggest that the ALD technique offers significant promise for thin film superconducting device applications. (C) 2014 AIP Publishing LLC.
Açıklama
Anahtar Kelimeler
Thin-Films, Room-Temperature, Mixers, Transition, Chemistry, Nitrides, Niobium, Epitaxy, Sis
Kaynak
Applied Physics Letters
WoS Q Değeri
Q1
Scopus Q Değeri
Q1
Cilt
104
Sayı
9
