Tunneling spectroscopy of superconducting MoN and NbTiN grown by atomic layer deposition
dc.authorid | ALTIN, Serdar/0000-0002-4590-907X | |
dc.authorid | Klug, Jeffrey/0000-0002-1130-5569 | |
dc.authorwosid | Pellin, Michael J/B-5897-2008 | |
dc.authorwosid | ALTIN, Serdar/H-4880-2014 | |
dc.authorwosid | Klug, Jeffrey A/A-3653-2013 | |
dc.contributor.author | Groll, Nickolas R. | |
dc.contributor.author | Klug, Jeffrey A. | |
dc.contributor.author | Cao, Chaoyue | |
dc.contributor.author | Altin, Serdar | |
dc.contributor.author | Claus, Helmut | |
dc.contributor.author | Becker, Nicholas G. | |
dc.contributor.author | Zasadzinski, John F. | |
dc.date.accessioned | 2024-08-04T20:38:05Z | |
dc.date.available | 2024-08-04T20:38:05Z | |
dc.date.issued | 2014 | |
dc.department | İnönü Üniversitesi | en_US |
dc.description.abstract | A tunneling spectroscopy study is presented of superconducting MoN and Nb0.8Ti0.2N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV, respectively, with a corresponding critical temperature of 11.5K and 13.4K, among the highest reported T-c values achieved by the ALD technique. Tunnel junctions were obtained using a mechanical contact method with a Au tip. While the native oxides of these films provided poor tunnel barriers, high quality tunnel junctions with low zero bias conductance (below similar to 10%) were obtained using an artificial tunnel barrier of Al2O3 on the film's surface grown ex situ by ALD. We find a large critical current density on the order of 4 x 10(6) A/cm(2) at T = 0.8T(c) for a 60 nm MoN film and demonstrate conformal coating capabilities of ALD onto high aspect ratio geometries. These results suggest that the ALD technique offers significant promise for thin film superconducting device applications. (C) 2014 AIP Publishing LLC. | en_US |
dc.description.sponsorship | American Recovery and Reinvestment Act (ARRA) thru the US Department of Energy, Office of High Energy Physics Department of Science; TUBITAK-BIDEP; U.S. Department of Energy, Office of Science [DE-AC02-06CH11357] | en_US |
dc.description.sponsorship | The authors would like to thank INCOM, Inc., for providing us with the borosilicate substrates. This work was funded by American Recovery and Reinvestment Act (ARRA) thru the US Department of Energy, Office of High Energy Physics Department of Science to Argonne National Laboratory. The author Serdar Altin would like to thank TUBITAK-BIDEP for financial support during this study. Use of the Center for Nanoscale Materials and the Electron Microscopy Center at Argonne National Laboratory were supported by the U.S. Department of Energy, Office of Science under Contract No. DE-AC02-06CH11357. | en_US |
dc.identifier.doi | 10.1063/1.4867880 | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.issn | 1077-3118 | |
dc.identifier.issue | 9 | en_US |
dc.identifier.scopus | 2-s2.0-84896791275 | en_US |
dc.identifier.scopusquality | Q1 | en_US |
dc.identifier.uri | https://doi.org/10.1063/1.4867880 | |
dc.identifier.uri | https://hdl.handle.net/11616/96371 | |
dc.identifier.volume | 104 | en_US |
dc.identifier.wos | WOS:000332729200072 | en_US |
dc.identifier.wosquality | Q1 | en_US |
dc.indekslendigikaynak | Web of Science | en_US |
dc.indekslendigikaynak | Scopus | en_US |
dc.language.iso | en | en_US |
dc.publisher | Amer Inst Physics | en_US |
dc.relation.ispartof | Applied Physics Letters | en_US |
dc.relation.publicationcategory | Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı | en_US |
dc.rights | info:eu-repo/semantics/openAccess | en_US |
dc.subject | Thin-Films | en_US |
dc.subject | Room-Temperature | en_US |
dc.subject | Mixers | en_US |
dc.subject | Transition | en_US |
dc.subject | Chemistry | en_US |
dc.subject | Nitrides | en_US |
dc.subject | Niobium | en_US |
dc.subject | Epitaxy | en_US |
dc.subject | Sis | en_US |
dc.title | Tunneling spectroscopy of superconducting MoN and NbTiN grown by atomic layer deposition | en_US |
dc.type | Article | en_US |