Palladium and platinum thin films for low-concentration resistive hydrogen sensor: a comparative study
Küçük Resim Yok
Tarih
2021
Yazarlar
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Springer
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
In this study, palladium (Pd) and platinum (Pt) thin films are prepared via RF sputtering method with approximately 2 nm thicknesses on quartz substrates. Temperature-dependent resistances of Pd and Pt thin films are investigated at a temperature range from 30 to 130 degrees C. The results show that the resistance is directly proportional to temperature. The sensing properties of Pd and Pt thin films have been investigated depending on temperature and hydrogen concentration. It is found that Pt thin film shows higher sensitivity and lower limit of detection than Pd film, but the advantages of Pd thin film sensor are lower response time and unresponsive to the presence of oxygen compared to Pt thin film. The sensing mechanisms of Pd and Pt thin films are explained with continuous resistive H-2 sensor type and surface scattering phenomenon, respectively. The response and recovery times of the films are decreased with rising H-2 concentration and temperature.
Açıklama
Anahtar Kelimeler
[No Keywords]
Kaynak
Journal of Materials Science-Materials in Electronics
WoS Q Değeri
Q2
Scopus Q Değeri
Q2
Cilt
32
Sayı
5
