Palladium and platinum thin films for low-concentration resistive hydrogen sensor: a comparative study

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dc.authoridKILINC, Necmettin/0000-0003-2123-2938
dc.authorwosidKILINC, Necmettin/AAT-9845-2020
dc.contributor.authorKilinc, Necmettin
dc.date.accessioned2024-08-04T20:49:15Z
dc.date.available2024-08-04T20:49:15Z
dc.date.issued2021
dc.departmentİnönü Üniversitesien_US
dc.description.abstractIn this study, palladium (Pd) and platinum (Pt) thin films are prepared via RF sputtering method with approximately 2 nm thicknesses on quartz substrates. Temperature-dependent resistances of Pd and Pt thin films are investigated at a temperature range from 30 to 130 degrees C. The results show that the resistance is directly proportional to temperature. The sensing properties of Pd and Pt thin films have been investigated depending on temperature and hydrogen concentration. It is found that Pt thin film shows higher sensitivity and lower limit of detection than Pd film, but the advantages of Pd thin film sensor are lower response time and unresponsive to the presence of oxygen compared to Pt thin film. The sensing mechanisms of Pd and Pt thin films are explained with continuous resistive H-2 sensor type and surface scattering phenomenon, respectively. The response and recovery times of the films are decreased with rising H-2 concentration and temperature.en_US
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) [114M853]en_US
dc.description.sponsorshipThis study was supported by Scientific and Technological Research Council of Turkey (TUBITAK, Project Number: 114M853).en_US
dc.identifier.doi10.1007/s10854-021-05279-w
dc.identifier.endpage5578en_US
dc.identifier.issn0957-4522
dc.identifier.issn1573-482X
dc.identifier.issue5en_US
dc.identifier.scopus2-s2.0-85099990977en_US
dc.identifier.scopusqualityQ2en_US
dc.identifier.startpage5567en_US
dc.identifier.urihttps://doi.org/10.1007/s10854-021-05279-w
dc.identifier.urihttps://hdl.handle.net/11616/99736
dc.identifier.volume32en_US
dc.identifier.wosWOS:000612888500001en_US
dc.identifier.wosqualityQ2en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherSpringeren_US
dc.relation.ispartofJournal of Materials Science-Materials in Electronicsen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subject[No Keywords]en_US
dc.titlePalladium and platinum thin films for low-concentration resistive hydrogen sensor: a comparative studyen_US
dc.typeArticleen_US

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