Fabrication of a Portable Magnetic Microcantilever Using Fe40Ni38Mo4B18 Amorphous Ribbon and Its Application as a Humidity Sensor by Coating with TiO2 Nanotubes

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dc.contributor.authorAtalay, Selcuk
dc.contributor.authorErdemoglu, Sema
dc.contributor.authorYilmaz, Hatice Caglar
dc.contributor.authorMete, Emine
dc.contributor.authorInan, Orhan Orcun
dc.contributor.authorKolat, Veli Serkan
dc.date.accessioned2026-04-04T13:31:01Z
dc.date.available2026-04-04T13:31:01Z
dc.date.issued2024
dc.departmentİnönü Üniversitesi
dc.description.abstractMicrocantilevers (MCs) are highly sensitive sensors capable of detecting mass changes on the surface at the nanogram and even picogram scale. In this study, microcantilevers were fabricated for the first time using the Sodick AP250L Wire electrical discharge machining (EDM) from amorphous 2826MB (Fe40Ni38Mo4B18) ferromagnetic ribbons. This method is advantageous because it allows for the simultaneous production of a large number of microcantilevers, with about 100 MCs being produced in a single manufacturing process. Additionally, a straightforward and cost-effective measurement system was developed to measure the resonance frequency and frequency shift of the MC entirely through magnetic means, a technique not previously reported in the literature. To evaluate the performance of the MC, we employed it as a humidity sensor. For the TiO2-NT-coated MC, a frequency shift of approximately 202 Hz was observed when the humidity level changed from 5% to 95% relative humidity (RH).
dc.description.sponsorshipScientific and Technological Research Council of Turkey [123F073]; Scientific and Technological Research Council of Turkey (TUBITAK); TUBITAK
dc.description.sponsorshipThis study was supported by the Scientific and Technological Research Council of Turkey (TUBITAK) under Grant Number 123F073. The authors thank TUBITAK for their support.
dc.identifier.doi10.3390/magnetochemistry10120098
dc.identifier.issn2312-7481
dc.identifier.issue12
dc.identifier.orcid0000-0002-9730-9930
dc.identifier.orcid0000-0002-8864-5051
dc.identifier.scopus2-s2.0-85213485664
dc.identifier.scopusqualityQ2
dc.identifier.urihttps://doi.org/10.3390/magnetochemistry10120098
dc.identifier.urihttps://hdl.handle.net/11616/108525
dc.identifier.volume10
dc.identifier.wosWOS:001385651900001
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherMdpi
dc.relation.ispartofMagnetochemistry
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.snmzKA_WOS_20250329
dc.subjectamorphous ferromagnetic ribbon
dc.subjectmicrocantilever
dc.subjectresonance frequency
dc.subjecthumidity
dc.subjectTiO2
dc.titleFabrication of a Portable Magnetic Microcantilever Using Fe40Ni38Mo4B18 Amorphous Ribbon and Its Application as a Humidity Sensor by Coating with TiO2 Nanotubes
dc.typeArticle

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